Yield Prediction

• determine the cost of a new chip before fabrication,
• identify the cost of defect types for a particular chip or a range of chips,
• estimate the number of wafer starts required,
• show which defect types cause most yield loss,
• identify when a fabrication process is not performing as expected,
• determine the extent of parametric problems (design and process),
• monitor the fabrication process.

Inline yield prediction ST, Crolles.

• identify a chip design problem that results in yield loss,
• drive layout modifications to enhance yield,
• identify the best design for a particular process.

An accurate yield model requires both the chip critical areas and the process defect data .